diff --git a/source/dub/compilers/compiler.d b/source/dub/compilers/compiler.d
index 7cab029..d0e6151 100644
--- a/source/dub/compilers/compiler.d
+++ b/source/dub/compilers/compiler.d
@@ -386,15 +386,16 @@
 	import dub.internal.vibecompat.data.json;
 	import dub.internal.utils;
 
-	auto path = getTempDir() ~ "dub_platform_probe.d";
+	auto path = getTempFile("dub_platform_probe", ".d");
 
 	auto fil = openFile(path, FileMode.CreateTrunc);
 	scope (failure) {
 		fil.close();
-		removeFile(path);
 	}
 
 	fil.write(q{
+		module dub_platform_probe;
+
 		template toString(int v) { enum toString = v.stringof; }
 
 		pragma(msg, `{`);
diff --git a/source/dub/compilers/dmd.d b/source/dub/compilers/dmd.d
index 9f5e65d..810c06b 100644
--- a/source/dub/compilers/dmd.d
+++ b/source/dub/compilers/dmd.d
@@ -178,9 +178,8 @@
 
 	void invoke(in BuildSettings settings, in BuildPlatform platform, void delegate(int, string) output_callback)
 	{
-		auto res_file = getTempDir() ~ ("dub-build-"~uniform(0, uint.max).to!string~"-.rsp");
+		auto res_file = getTempFile("dub-build", ".rsp");
 		std.file.write(res_file.toNativeString(), join(settings.dflags.map!(s => s.canFind(' ') ? "\""~s~"\"" : s), "\n"));
-		scope (exit) remove(res_file.toNativeString());
 
 		logDiagnostic("%s %s", platform.compilerBinary, join(cast(string[])settings.dflags, " "));
 		invokeTool([platform.compilerBinary, "@"~res_file.toNativeString()], output_callback);
diff --git a/source/dub/compilers/gdc.d b/source/dub/compilers/gdc.d
index e31053f..90bdcea 100644
--- a/source/dub/compilers/gdc.d
+++ b/source/dub/compilers/gdc.d
@@ -67,7 +67,12 @@
 		}
 		settings.addDFlags(arch_flags);
 
-		auto result = executeShell(escapeShellCommand(compiler_binary ~ arch_flags ~ ["-c", "-o", (getTempDir()~"dub_platform_probe").toNativeString(), fil.toNativeString()]));
+		auto binary_file = getTempFile("dub_platform_probe");
+		auto result = executeShell(escapeShellCommand(
+			compiler_binary ~
+			arch_flags ~
+			["-c", "-o", binary_file.toNativeString(), fil.toNativeString()]
+		));
 		enforce(result.status == 0, format("Failed to invoke the compiler %s to determine the build platform: %s",
 			compiler_binary, result.output));
 
@@ -176,9 +181,8 @@
 
 	void invoke(in BuildSettings settings, in BuildPlatform platform, void delegate(int, string) output_callback)
 	{
-		auto res_file = getTempDir() ~ ("dub-build-"~uniform(0, uint.max).to!string~"-.rsp");
+		auto res_file = getTempFile("dub-build", ".rsp");
 		std.file.write(res_file.toNativeString(), join(settings.dflags.map!(s => escape(s)), "\n"));
-		scope (exit) remove(res_file.toNativeString());
 
 		logDiagnostic("%s %s", platform.compilerBinary, join(cast(string[])settings.dflags, " "));
 		invokeTool([platform.compilerBinary, "@"~res_file.toNativeString()], output_callback);
diff --git a/source/dub/compilers/ldc.d b/source/dub/compilers/ldc.d
index f75caa8..fb214dd 100644
--- a/source/dub/compilers/ldc.d
+++ b/source/dub/compilers/ldc.d
@@ -166,9 +166,8 @@
 
 	void invoke(in BuildSettings settings, in BuildPlatform platform, void delegate(int, string) output_callback)
 	{
-		auto res_file = getTempDir() ~ ("dub-build-"~uniform(0, uint.max).to!string~"-.rsp");
+		auto res_file = getTempFile("dub-build", ".rsp");
 		std.file.write(res_file.toNativeString(), join(cast(string[])settings.dflags, "\n"));
-		scope (exit) remove(res_file.toNativeString());
 
 		logDiagnostic("%s %s", platform.compilerBinary, join(cast(string[])settings.dflags, " "));
 		invokeTool([platform.compilerBinary, "@"~res_file.toNativeString()], output_callback);
diff --git a/source/dub/dub.d b/source/dub/dub.d
index da578c2..6e504cc 100644
--- a/source/dub/dub.d
+++ b/source/dub/dub.d
@@ -362,7 +362,7 @@
 			}
 
 			// generate main file
-			Path mainfile = getTempDir() ~ "dub_test_root.d";
+			Path mainfile = getTempFile("dub_test_root", ".d");
 			tcinfo.sourceFiles[""] ~= mainfile.toNativeString();
 			tcinfo.mainSourceFile = mainfile.toNativeString();
 			if (!m_dryRun) {
diff --git a/source/dub/internal/utils.d b/source/dub/internal/utils.d
index c1ba34e..754c1c4 100644
--- a/source/dub/internal/utils.d
+++ b/source/dub/internal/utils.d
@@ -28,7 +28,70 @@
 
 Path getTempDir()
 {
-	return std.file.tempDir;
+	return Path(std.file.tempDir());
+}
+
+private Path[] temporary_files;
+
+version (Posix)
+	private extern(C) int mkstemps(char *, int);
+else
+	private extern(Windows) uint GetTempFileName(
+		const(char)* lpPathName,
+		const(char)* lpPrefixString,
+		uint uUnique,
+		char* lpTempFileName
+	);
+
+Path getTempFile(string prefix, string extension = null)
+{
+	version (Posix)
+	{
+		auto name = (getTempDir() ~ prefix).toString();
+
+		// build 0-terminated template for mkstemp
+		auto suffix = "-XXXXXX" ~ extension;
+		auto pattern = new char[](name.length + suffix.length + 1);
+		pattern[0..name.length] = name[];
+		pattern[name.length .. $-1] = suffix[];
+		pattern[$-1] = '\0';
+
+		auto handle = mkstemps(pattern.ptr, to!int(extension.length));
+		enforce(handle > 0);
+
+		pattern = pattern[0..$-1]; // get rid of \0
+		auto path = Path(assumeUnique(pattern));
+		temporary_files ~= path;
+		return path;
+	}
+	else version (Windows)
+	{
+		import core.sys.windows.windows : MAX_PATH;
+        import std.string : toStringz, fromStringz;
+	
+		auto dir = getTempDir().toStringz();
+		auto name = prefix.toStringz();	
+		char[MAX_PATH] output = void;
+
+		auto status = GetTempFileName(dir, name, 0, output.ptr);
+		enforce(status != 0);
+
+		auto path = Path(output.fromStringz() ~ extension);
+		temporary_files ~= path;
+		return path;
+	}
+	else
+	{
+		static assert (false, "please report the problem to https://github.com/D-Programming-Language/dub");
+	}
+}
+
+static ~this()
+{
+	foreach (path; temporary_files)
+	{
+		std.file.remove(path.toNativeString());
+	}
 }
 
 bool isEmptyDir(Path p) {