diff --git a/source/dub/compilers/compiler.d b/source/dub/compilers/compiler.d
index 7cab029..d0e6151 100644
--- a/source/dub/compilers/compiler.d
+++ b/source/dub/compilers/compiler.d
@@ -386,15 +386,16 @@
 	import dub.internal.vibecompat.data.json;
 	import dub.internal.utils;
 
-	auto path = getTempDir() ~ "dub_platform_probe.d";
+	auto path = getTempFile("dub_platform_probe", ".d");
 
 	auto fil = openFile(path, FileMode.CreateTrunc);
 	scope (failure) {
 		fil.close();
-		removeFile(path);
 	}
 
 	fil.write(q{
+		module dub_platform_probe;
+
 		template toString(int v) { enum toString = v.stringof; }
 
 		pragma(msg, `{`);
diff --git a/source/dub/compilers/dmd.d b/source/dub/compilers/dmd.d
index 9f5e65d..810c06b 100644
--- a/source/dub/compilers/dmd.d
+++ b/source/dub/compilers/dmd.d
@@ -178,9 +178,8 @@
 
 	void invoke(in BuildSettings settings, in BuildPlatform platform, void delegate(int, string) output_callback)
 	{
-		auto res_file = getTempDir() ~ ("dub-build-"~uniform(0, uint.max).to!string~"-.rsp");
+		auto res_file = getTempFile("dub-build", ".rsp");
 		std.file.write(res_file.toNativeString(), join(settings.dflags.map!(s => s.canFind(' ') ? "\""~s~"\"" : s), "\n"));
-		scope (exit) remove(res_file.toNativeString());
 
 		logDiagnostic("%s %s", platform.compilerBinary, join(cast(string[])settings.dflags, " "));
 		invokeTool([platform.compilerBinary, "@"~res_file.toNativeString()], output_callback);
diff --git a/source/dub/compilers/gdc.d b/source/dub/compilers/gdc.d
index e31053f..90bdcea 100644
--- a/source/dub/compilers/gdc.d
+++ b/source/dub/compilers/gdc.d
@@ -67,7 +67,12 @@
 		}
 		settings.addDFlags(arch_flags);
 
-		auto result = executeShell(escapeShellCommand(compiler_binary ~ arch_flags ~ ["-c", "-o", (getTempDir()~"dub_platform_probe").toNativeString(), fil.toNativeString()]));
+		auto binary_file = getTempFile("dub_platform_probe");
+		auto result = executeShell(escapeShellCommand(
+			compiler_binary ~
+			arch_flags ~
+			["-c", "-o", binary_file.toNativeString(), fil.toNativeString()]
+		));
 		enforce(result.status == 0, format("Failed to invoke the compiler %s to determine the build platform: %s",
 			compiler_binary, result.output));
 
@@ -176,9 +181,8 @@
 
 	void invoke(in BuildSettings settings, in BuildPlatform platform, void delegate(int, string) output_callback)
 	{
-		auto res_file = getTempDir() ~ ("dub-build-"~uniform(0, uint.max).to!string~"-.rsp");
+		auto res_file = getTempFile("dub-build", ".rsp");
 		std.file.write(res_file.toNativeString(), join(settings.dflags.map!(s => escape(s)), "\n"));
-		scope (exit) remove(res_file.toNativeString());
 
 		logDiagnostic("%s %s", platform.compilerBinary, join(cast(string[])settings.dflags, " "));
 		invokeTool([platform.compilerBinary, "@"~res_file.toNativeString()], output_callback);
diff --git a/source/dub/compilers/ldc.d b/source/dub/compilers/ldc.d
index f75caa8..fb214dd 100644
--- a/source/dub/compilers/ldc.d
+++ b/source/dub/compilers/ldc.d
@@ -166,9 +166,8 @@
 
 	void invoke(in BuildSettings settings, in BuildPlatform platform, void delegate(int, string) output_callback)
 	{
-		auto res_file = getTempDir() ~ ("dub-build-"~uniform(0, uint.max).to!string~"-.rsp");
+		auto res_file = getTempFile("dub-build", ".rsp");
 		std.file.write(res_file.toNativeString(), join(cast(string[])settings.dflags, "\n"));
-		scope (exit) remove(res_file.toNativeString());
 
 		logDiagnostic("%s %s", platform.compilerBinary, join(cast(string[])settings.dflags, " "));
 		invokeTool([platform.compilerBinary, "@"~res_file.toNativeString()], output_callback);
diff --git a/source/dub/dub.d b/source/dub/dub.d
index fdafe6b..ad31b55 100644
--- a/source/dub/dub.d
+++ b/source/dub/dub.d
@@ -362,7 +362,7 @@
 			}
 
 			// generate main file
-			Path mainfile = getTempDir() ~ "dub_test_root.d";
+			Path mainfile = getTempFile("dub_test_root", ".d");
 			tcinfo.sourceFiles[""] ~= mainfile.toNativeString();
 			tcinfo.mainSourceFile = mainfile.toNativeString();
 			if (!m_dryRun) {
diff --git a/source/dub/internal/utils.d b/source/dub/internal/utils.d
index 766f039..de7ebc6 100644
--- a/source/dub/internal/utils.d
+++ b/source/dub/internal/utils.d
@@ -28,13 +28,26 @@
 
 Path getTempDir()
 {
-	auto tmp = environment.get("TEMP");
-	if( !tmp.length ) tmp = environment.get("TMP");
-	if( !tmp.length ){
-		version(Posix) tmp = "/tmp/";
-		else tmp = "./";
+	return Path(std.file.tempDir());
+}
+
+private Path[] temporary_files;
+
+Path getTempFile(string prefix, string extension = null)
+{
+	import std.uuid : randomUUID;
+
+	auto path = getTempDir() ~ (prefix ~ "-" ~ randomUUID.toString() ~ extension);
+	temporary_files ~= path;
+	return path;
+}
+
+static ~this()
+{
+	foreach (path; temporary_files)
+	{
+		std.file.remove(path.toNativeString());
 	}
-	return Path(tmp);
 }
 
 bool isEmptyDir(Path p) {